Several layers of heat resistance steel and Moly screen are set at certain fixed way as the hot zone main structure by sealed into a circumference heat-insulation layer as well as a flat insulation layer on the after-chamber. The front door of hot zone is fixed with the front door of furnace, when the furnace door is closed, the hot zone door will also be sealed onto the hot zone drums, then the spring on furnace door bracket makes compression close the hot zone door.
Heating elements are a batch of connected flat-shaped Mo-Lan belts which fixed on heat-insulation inner layer by Moly components and ceramic components for electric insulation. Six pieces of annular-ringed continuous heating belts ensure uniform heating of the work piece and temperature uniformity. Replacement and maintenance are also very convenient.
ROUND HOT ZONE WITH METAL INSULATION
Besides, during working of the diffusion pump, a small holding pump can be configured together from energy point, in addition of exhaust pipe and cut-off valve.
Diffusion pump can be configured depending on the furnace size to achieve an ultimate vacuum of 5x10-5mbar.
In order to get better part surface, it can be configured with high vacuum systems in furnace design.
HIGH VACUUM SYSTEM